Piezoelectric element, stator for oscillatory wave motor, oscillatory wave motor, driving control system, optical apparatus, and method for making stator for oscillatory wave motor
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Feb 13, 2018
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Dec 19, 2013
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Dec 26, 2012
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Abstract
The present invention provides a piezoelectric element that includes a piezoelectric material having first and second surfaces; a common electrode disposed on the first surface; and a plurality of drive phase electrodes, a detection phase electrode, and a non-drive phase electrode disposed on the second surface, the piezoelectric material being sandwiched between the common electrode and the electrodes on the second surface. An absolute value d(1) of a piezoelectric constant of the piezoelectric material (1) in portions sandwiched between the drive phase electrodes and the common electrode, an absolute value d(2) of a piezoelectric constant of the piezoelectric material (2) in a portion sandwiched between the detection phase electrode and the common electrode, and an absolute value d(3) of the piezoelectric material (3) in a portion sandwiched between the non-drive phase electrode and the common electrode satisfy d(2)<0.95d(1), d(3)<0.95d(1), and 0.9≦d(3)/d(2)≦1.1.
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