Method for patterning mesoporous inorganic oxide film, and electric device including mesoporous inorganic oxide film patterned by the same
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United States of America Patent
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Feb 13, 2018
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Jun 29, 2016
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Jul 4, 2012
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Abstract
Provided are a method for patterning a mesoporous inorganic oxide film, the method including a step of forming a mesoporous inorganic oxide film using a composition containing inorganic oxide particles; and a step of forming a pattern on the mesoporous inorganic oxide film using an elastic stamp for pattern formation, and then calcining the mesoporous inorganic oxide, and an electronic device including a mesoporous inorganic oxide film that has been patterned by the patterning method.
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