Proportional integral derivative control incorporating multiple actuators

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United States of America Patent

PATENT NO 9891599
SERIAL NO

15012284

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Abstract

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Embodiments of the disclosure provide proportional integral derivative control (PID) using multiple actuators. In one embodiment, a process includes providing a PID controller in communication with a primary actuator and a secondary actuator, the primary actuator and the secondary actuator coupled to a handler, such as a robotic arm for manipulating an object. The process further includes receiving position feedback and a specified trajectory for the handler, and generating a dynamic feedforward force command and a position correction command for the handler based on the position feedback and the specified trajectory. The process further includes providing, from the PID controller, the dynamic feedforward force command to the secondary actuator and the position correction command to the primary actuator.

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Patent Owner(s)

Patent OwnerAddress
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC35 DORY ROAD GLOUCESTER MA 01930

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
LoPiccolo, Jack J Gloucester, US 2 6
Mitchell, Robert J Winchester, US 42 269

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