Conjugate common optical path lithography lens
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United States of America Patent
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Feb 13, 2018
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app pub date -
Jun 16, 2015
filing date -
Jun 16, 2015
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Abstract
A conjugate common light path lithography lens set includes a first, second, third, and fourth spherical mirrors, arranged sequentially, a spherical reflecting mirror arranged below the fourth spherical mirror, a first and second planar reflecting mirrors, inclinedly arranged above the first spherical mirror, so that a conjugate telecentric component pattern is formed to maintain an pattern of an object to have a non-deformed pattern after experiencing these optical components. As such, the omni-spherical mirror set and two kinds of optical material are mutually arranged to form the novel conjugate common light path lithography lens set. This may further achieve the function of the lithography lens, and have a direct effect on the manufacturing cost. And, the efficacies of reduced component number, easier manufacture of the optical components (satisfied with the lens manufacturing's experience equation), easier calibration, reduced chromatic abberation, optimized aperature F/#, and a reduced cost may be achieved.
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