Integrated electro-optic modulator
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United States of America Patent
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Feb 13, 2018
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N/A
app pub date -
Mar 30, 2016
filing date -
Sep 16, 2015
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Abstract
An E/O phase modulator may include a waveguide having an insulating substrate, a single-crystal silicon strip and a polysilicon strip of a same thickness and doped with opposite conductivity types above the insulating substrate, and an insulating interface layer between the single-crystal silicon strip and polysilicon strip. Each of the single-crystal silicon strip and polysilicon strip may be laterally continued by a respective extension, and a respective electrical contact coupled to each extension.
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