Electronic device, physical quantity sensor, pressure sensor, vibrator, altimeter, electronic apparatus, and moving object
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United States of America Patent
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Feb 13, 2018
Issued Date -
N/A
app pub date -
Nov 25, 2015
filing date -
Nov 28, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A physical quantity sensor includes a substrate, a piezoresistive element that is arranged on one face side of the substrate, a wall portion that is arranged to surround the piezoresistive element on the one face side of the substrate in a plan view of the substrate, and a ceiling portion that constitutes a cavity portion with the wall portion, in which the ceiling portion includes a cladding layer that has a pore which passes therethrough in the thickness direction of the cladding layer, and a seal layer that is stacked on the opposite side of the cladding layer from the substrate and closes the pore, the seal layer in which at least a part of the outer periphery of a contact portion where the seal layer is in contact with the cladding layer is on the outside of the cavity portion in a plan view.
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