Sensor, strain sensor, and pressure sensor
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United States of America Patent
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Feb 13, 2018
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N/A
app pub date -
Sep 1, 2015
filing date -
Sep 4, 2014
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Abstract
A sensor includes a first structure that is attachable to a measurement specimen, a second structure that is made of material which is smaller in thermal expansion coefficient than the first structure, a bottom surface of the second structure being connected to the first structure, and a detector that is connected to an upper surface of the second structure, the detector being configured to detect a deformation of the second structure.
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