Interferometric encoders using spectral analysis
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United States of America Patent
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Feb 13, 2018
Grant Date -
Jan 14, 2016
app pub date -
Jul 14, 2015
filing date -
Jul 14, 2014
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Abstract
Determining information about a degree of freedom of rigid body motion of an encoder scale includes: directing a first beam toward an encoder scale, in which the first beam diffracts from an encoder scale; combining a diffracted component of the first beam with a second beam to form an interfering output beam; monitoring changes in the output beam as a function of a wavelength of the first and second beams; and determining the information about a degree of freedom of rigid body motion of the encoder scale based on changes in the output beam as a function of the wavelength.
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