MEMS device with improved spring system
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United States of America Patent
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Feb 13, 2018
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N/A
app pub date -
Jul 15, 2015
filing date -
Sep 11, 2009
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Abstract
A system and method in accordance with an embodiment reduces the cross-axis sensitivity of a gyroscope. This is achieved by building a gyroscope using a mechanical transducer that comprises a spring system that is less sensitive to fabrication imperfection and optimized to minimize the response to the rotations other than the intended input rotation axis. The longitudinal axes of the first and second flexible elements are parallel to each other and parallel to the first direction.
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