High purity phosphorus oxychloride safe feeding system
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United States of America Patent
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Feb 13, 2018
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Jun 17, 2014
filing date -
Jun 19, 2013
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Abstract
A high-purity phosphorus oxychloride safety feed system improves continuity and intelligent control of operation and usage, addresses alarm reporting, takes measures when leakage of high purity phosphorus oxychloride occurs, and solves problem of on-site and remote monitoring and material liquid level monitoring during use. The feeding device is provided with: an automatic tail gas exhaust outlet, a high purity phosphorus oxychloride gas leakage detection alarm, a video surveillance camera, a low liquid level detection alarm, an LED illuminating lamp, and an observation window.
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