Stress compensation for piezoelectric optical MEMS devices
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United States of America Patent
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Feb 13, 2018
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app pub date -
Nov 5, 2014
filing date -
Jun 30, 2014
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Abstract
An apparatus includes a lens material forming a lens. The apparatus also includes a piezoelectric capacitor over the lens material, where the piezoelectric capacitor is configured to change a shape of the lens material in response to a voltage across the piezoelectric capacitor to thereby change a focus of the lens. The apparatus further includes at least one stress compensation ring over a portion of the lens material and over at least a portion of the piezoelectric capacitor. The at least one stress compensation ring is configured to at least partially reduce bending of the lens material caused by stress on or in the lens material.
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