Apparatus and method for positioning a substrate on a support body
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United States of America Patent
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Feb 13, 2018
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N/A
app pub date -
Oct 20, 2016
filing date -
Nov 3, 2015
priority date (Note) -
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Abstract
An apparatus is provided for positioning a substrate on a support body. The apparatus comprises the support body for supporting the substrate, at least one registration element, wherein said at least one registration element is positioned and arranged for registering the substrate in a preselected position on the support body when brought into a registering state. The apparatus further comprises a registration actuator movably arranged with respect to the support body for selectively arranging a registration element into the registering state.
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