Polishing equipment having discontinuous adhesion points and method for making the sheet
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United States of America Patent
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Feb 13, 2018
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app pub date -
Aug 5, 2009
filing date -
Mar 6, 2009
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Abstract
The sheet of a polishing equipment of the present invention includes a buffer layer, an adsorption layer, and an adhesion layer. The adhesion layer is disposed between the buffer layer and the adsorption layer. The adhesion layer has a plurality of adhesion points to bind the buffer layer and the adsorption layer together. The adhesion points are discontinuous and have gaps in between. Consequently, when the sheet is pressed, air can be vented out through the gaps between the adhesion points, so that the adsorption force is increased.
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