Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9888555
SERIAL NO

15422489

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.

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Patent Owner(s)

Patent OwnerAddress
GIGAPHOTON INCOYAMA-SHI TOCHIGI 323-8558

International Classification(s)

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  • 2017 Application Filing Year
  • G01J Class
  • 1764 Applications Filed
  • 1425 Patents Issued To-Date
  • 80.79 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances201720182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ando, Masahiko Oyama, JP 166 2393
Suzuki, Toru Oyama, JP 255 2765
Ueno, Yoshifumi Oyama, JP 69 678

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Patent Citation Ranking

  • 3 Citation Count
  • G01J Class
  • 24.81 % this patent is cited more than
  • 7 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges1614224612312201 - 1011 - 2021 - 3031 - 4041 - 5051 - 6071 - 800255075100125150175200225250275300325350375400425450

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