Transmission system for transmitting pulse laser beam to extreme ultraviolet light chamber, and laser system
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
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Feb 6, 2018
Issued Date -
N/A
app pub date -
Feb 2, 2017
filing date -
Sep 8, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
The transmission system may include: an optical path adjustment device configured to substantially unify optical paths of a first pre-pulse laser beam and a second pre-pulse laser beam; an optical path separation device configured to separate the optical paths of the substantially unified first pre-pulse laser beam and the second pre-pulse laser beam to an optical path for the first pre-pulse laser beam and an optical path for the second pre-pulse laser beam; a first beam adjustment device disposed on the optical path for the first pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the first pre-pulse laser beam; and a second beam adjustment device disposed on the optical path for the second pre-pulse laser beam separated by the optical path separation device and configured to adjust a beam parameter of the second pre-pulse laser beam.
First Claim
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Family

- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
Patent Owner | Address | |
---|---|---|
GIGAPHOTON INC | OYAMA-SHI TOCHIGI 323-8558 |
International Classification(s)

- 2017 Application Filing Year
- G01J Class
- 1764 Applications Filed
- 1425 Patents Issued To-Date
- 80.79 % Issued To-Date
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Ando, Masahiko | Oyama, JP | 166 | 2393 |
# of filed Patents : 166 Total Citations : 2393 | |||
Suzuki, Toru | Oyama, JP | 255 | 2765 |
# of filed Patents : 255 Total Citations : 2765 | |||
Ueno, Yoshifumi | Oyama, JP | 69 | 678 |
# of filed Patents : 69 Total Citations : 678 |
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Patent Citation Ranking
- 3 Citation Count
- G01J Class
- 24.81 % this patent is cited more than
- 7 Age
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