Substrate support with multiple heating zones

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United States of America Patent

PATENT NO 9888528
SERIAL NO

14634711

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Abstract

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Embodiments of substrate supports are provided herein. In some embodiments, a substrate support may include a body having a support surface; and a first heater disposed within the body and having a first heating coil and multiple heating zones, wherein a pitch of windings of the first heating coil vary among each of the multiple heating zones to define a predetermined heating ratio between the multiple heating zones.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamath, Aravind Santa Clara, US 8 91
Koppa, Manjunatha Bangalore, IN 17 53
Matsushita, Tomoharu Chiba, JP 10 56
Ravi, Jallepally San Ramon, US 44 947
Tsai, Cheng-Hsiung Cupertino, US 102 4631
Yuan, Xiaoxiong San Jose, US 60 5463

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