Laser apparatus having condensation prevention function
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United States of America Patent
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Feb 6, 2018
Issued Date -
N/A
app pub date -
Dec 2, 2016
filing date -
Dec 4, 2015
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A laser apparatus that can reliably prevent the formation of condensation is disclosed. In the laser apparatus, the temperature of cooling water supplied into the interior of the laser apparatus is controlled within a first predetermined temperature range during laser oscillation, while at the same time, continuously performing dehumidification so that the relation (dew point of air inside laser apparatus)+(first predetermined temperature difference)≦(cooling water temperature) is maintained. The dew point of the air inside the laser apparatus can be obtained by a computing unit from the humidity and temperature of the air.
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