Emitter and method for manufacturing the same

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United States of America Patent

PATENT NO 9887355
SERIAL NO

15079472

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Abstract

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A method for manufacturing an emitter comprises providing a semiconductor substrate having a main surface, the semiconductor substrate comprising a cavity adjacent to the main surface. A portion of the semiconductor substrate arranged between the cavity and the main surface of the semiconductor substrate forms a support structure. The method comprises arranging an emitting element at the support structure, the emitting element being configured to emit a thermal radiation of the emitter, wherein the cavity provides a reduction of a thermal coupling between the emitting element and the semiconductor substrate.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES DRESDEN GMBH & CO KGKÖNIGSBRÜCKERSTR 180 DRESDEN 01099

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bieselt, Steffen Stadt Wehlen, DE 38 96
Froehlich, Heiko Radebeul, DE 31 71
Kautzsch, Thoralf Dresden, DE 92 375
Stegemann, Maik Pesterwitz, DE 41 115
Vogt, Mirko Dresden, DE 55 195

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