Ferroelectric ceramics and manufacturing method thereof

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United States of America Patent

PATENT NO 9887348
SERIAL NO

14620496

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Abstract

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To obtain a piezoelectric film having excellent piezoelectric properties. One aspect of the present invention relates to ferroelectric ceramics including a ZrO2 film oriented in (200), a Pt film that is formed on the ZrO2 film and is oriented in (200) and a piezoelectric film formed on the Pt film.

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Patent Owner(s)

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KRYSTAL INC2-1-17 ASUTOPIA UBE-SHI YAMAGUCHI 755-0152

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuyama, Koichi Chiba, JP 13 68
Honda, Yuuji Chiba, JP 53 491
Kijima, Takeshi Chiba, JP 167 1581

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