Piezoelectric element, piezoelectric actuator and electronic instrument using the same
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United States of America Patent
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Feb 6, 2018
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app pub date -
Nov 17, 2016
filing date -
Nov 27, 2015
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Abstract
A piezoelectric element includes a substrate, a first electrode, a piezoelectric film and a second electrode that are sequentially placed in the above-mentioned order. The piezoelectric film contains oxides of Ba, Bi, Ti, Zr, Fe and Mn and has a perovskite structure, wherein the molar ratio y of Bi relative to the sum of Ba and Bi is 0.001≦y≦0.015, the molar ratio x of Zr relative to the sum of Ti, Zr, Fe and Mn is 0.010≦x≦0.060, the molar ratio z of Fe relative to the sum of Ti, Zr, Fe and Mn is 0.001≦z≦0.015, and the molar ratio m of Mn relative to the sum of Ti, Zr, Fe and Mn is 0.0020≦m≦0.0150, while the relationship between y and z is expressed by 0.90≦y/z≦1.10.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B06B:GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS I....
- B41J:TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. M....
- H02N:ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....
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