Electrostatic chuck and semiconductor-liquid crystal manufacturing apparatus
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United States of America Patent
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Feb 6, 2018
Issued Date -
N/A
app pub date -
May 8, 2015
filing date -
May 22, 2014
priority date (Note) -
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Abstract
An electrostatic chuck includes a base plate including a penetration hole, a placing table arranged on the base plate, and including an electrode at a position corresponding to the penetration hole, a first cylindrical insulating component arranged on an upper side inside the penetration hole of the base plate, a second cylindrical insulating component arranged on the first cylindrical insulating component, a third cylindrical insulating component arranged under the first cylindrical insulating component, and having an inner diameter smaller than an inner diameter of the first cylindrical insulating component, a connector arranged in the penetration hole, a cylindrical member included in the connector, and including an elastic body in an inner part, and a power feeding terminal included in the connector, and connected to the elastic body. The power feeding terminal touches the electrode of the placing table.
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