Apparatus and method for annular optical power management

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United States of America Patent

PATENT NO 9885878
SERIAL NO

14250373

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Abstract

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A system and method for obtaining super-resolution image of an object. An illumination beam is directed through an optical axis onto the object to be imaged. Paraxial rays of the illumination beam are deflected away from the optical axis and into a beam dump. The non-paraxial rays are collected after being reflected by the object so as to generate an image only from the non-paraxial rays.

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Patent Owner(s)

Patent OwnerAddress
FEI EFA INC3400 W WARREN AVE FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Serrels, Keith Fremont, US 7 43

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