Standing wave interferometric microscope

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United States of America Patent

PATENT NO 9885660
SERIAL NO

15246512

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Abstract

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A wide-field interferometric microscope comprising:

    A specimen holder, for holding a specimen at an analysis location;An illuminator, for illuminating the specimen with input radiation, so as to cause it to emit fluorescence light;A pair of projection systems, arranged at opposite sides of said analysis location, to collect at least a portion of said fluorescence light and direct a corresponding pair of light beams into a respective pair of inputs of an optical combining element, where they optically interfere;A detector arrangement, for examining output light from said combining element,wherein:The illuminator is configured to produce a standing wave of input radiation at the analysis locationThe detector arrangement comprises exactly two interferometric detection branches.

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Patent Owner(s)

Patent OwnerAddress
FEI COMPANY5350 NE DAWSON CREEK DRIVE HILLSBORO OR 97124

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Daum, Rainer Wessling, DE 13 55
Voegele, Xaver Munich, DE 6 4

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