Substrate support assembly having rapid temperature control
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United States of America Patent
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Jan 30, 2018
Issued Date -
N/A
app pub date -
Jan 16, 2016
filing date -
Jul 20, 2006
priority date (Note) -
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Abstract
A substrate support assembly comprises a ceramic puck having a substrate receiving surface and an opposing backside surface. The ceramic puck has an electrode and a heater embedded therein. The heater comprises first and second coils that are radially spaced apart. A base of the support assembly comprises a channel to circulate fluid therethrough, the channel comprising an inlet and terminus that are adjacent to one another so that the channel loops back upon itself. A compliant layer bonds the ceramic puck to the base.
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