Alkali-niobate-based piezoelectric thin film element
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United States of America Patent
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Jan 30, 2018
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Feb 7, 2015
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Feb 13, 2014
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Abstract
An alkali-niobate-based piezoelectric thin film element includes a substrate, a lower electrode film on the substrate, a piezoelectric thin film on the lower electrode film, and an upper electrode film on the piezoelectric thin film. The piezoelectric thin film is made of an alkali-niobate-based piezoelectric material represented by the formula (NaxKyLiz)NbO3, where 0≦x≦1, 0≦y≦1, 0≦z≦0.2, and x+y+z=1. The piezoelectric thin film has an element pattern and contains a metal element in a higher concentration near the upper electrode film than near the lower electrode film. The average concentration of the metal element is 5×1017 atoms/cm3 or less in a region within ±15% of the thickness of the piezoelectric thin film from a position corresponding to half the thickness of the piezoelectric thin film.
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