Evaporation equipment and evaporating method
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United States of America Patent
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Jan 30, 2018
Grant Date -
Oct 13, 2016
app pub date -
Oct 27, 2014
filing date -
Aug 28, 2014
priority date (Note) -
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Abstract
The disclosed in the present disclosure is an evaporation equipment and an evaporating method. The evaporation equipment may include: a support, which is arranged for loading a substrate to be evaporated; and a zone temperature controlling device, which includes at least two temperature controlling parts and at least one temperature controlling device. A loading surface of the support may include a plurality of zones, and each of the plurality of zones may correspond to an evaporation region of the substrate to be evaporated. And each of the plurality of zones may be arranged with a temperature controlling part, and the temperature controlling device may be configured to control temperatures provided by the temperature controlling parts, so as to control corresponding deposition rates of film coating on the evaporation regions.
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