Thin film transistor and array substrate, manufacturing methods thereof, and display device

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United States of America Patent

PATENT NO 9882060
SERIAL NO

14905512

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Abstract

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Embodiments of the present invention disclose a thin film transistor and an array substrate, manufacturing methods thereof, and a display device, which relate to the field of display technology, and can improve drifting of a threshold voltage of a thin film transistor and enhance the stability and reliability of an array substrate. The thin film transistor comprises an active layer and a gate insulating layer, wherein the material of the active layer is a metal oxide semiconductor, and during forming the thin film transistor, the gate insulating layer conveys oxygen to the active layer so as to reduce an interface state density and a movable impurity concentration of a contact interface between the active layer and the gate insulating layer.

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Patent Owner(s)

Patent OwnerAddress
BOE TECHNOLOGY GROUP CO LTD100015 NO 10 JIUXIANQIAO ROAD BEIJING CHAOYANG DISTRICT BEIJING CITY BEIJING CITY 100015

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Xiaodi Beijing, CN 29 65
Wang, Gang Beijing, CN 1411 9119

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