Method of manufacturing a bipolar semiconductor switch

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United States of America Patent

PATENT NO 9882038
SERIAL NO

15449634

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Abstract

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A method for forming a bipolar semiconductor switch includes providing a semiconductor body which has a main surface, a back surface arranged opposite to the main surface, and a first semiconductor layer, and reducing a charge carrier life-time in the semiconductor body. The charge carrier life-time is reduced by at least one of indiffusing heavy metal into the first semiconductor layer, implanting protons into the first semiconductor layer and implanting helium nuclei into the first semiconductor layer, so that the charge carrier life-time has, in a vertical direction which is substantially orthogonal to the main surface, a minimum in a lower n-type portion of the first semiconductor layer where a concentration of n-type dopants is substantially close to a maximum.

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Patent Owner(s)

Patent OwnerAddress
INFINEON TECHNOLOGIES AGCAMPBELL 1-15 NAUBIBERG GERMANY NEUBIBERG BAVARIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Niedernostheide, Franz-Josef Muenster, DE 104 782
Schulze, Hans-Joachim Taufkirchen, DE 693 4306

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