Pitch split patterning for semiconductor devices
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United States of America Patent
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Jan 30, 2018
Issued Date -
N/A
app pub date -
Jun 29, 2016
filing date -
Jun 29, 2016
priority date (Note) -
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Abstract
A method for forming fins of a semiconductor device comprises forming a first hardmask on a substrate, a sacrificial layer on the first hardmask, and a second hardmask on the sacrificial layer. Portions of the second hardmask and the sacrificial layer are removed to form a mandrel. Spacers are formed adjacent to the sacrificial mandrel. A second sacrificial layer is deposited and portions of the second sacrificial layer are removed to expose portions of the spacers and the first hardmask. A first doped region and a second doped region are formed by annealing. The second hardmask and the sacrificial spacer are removed. Undoped portions of the sacrificial mandrel and the second sacrificial layer are removed to further expose portions of the first hardmask. Exposed portions of the first hardmask are removed to expose portions of the semiconductor substrate, and exposed portions of the semiconductor substrate are removed to form fins.
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