Semiconductor device with reduced parasitic drain-gate capacitance and method of manufacturing the same
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United States of America Patent
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Jan 30, 2018
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app pub date -
Oct 6, 2016
filing date -
Feb 4, 2016
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Abstract
A semiconductor device having electrodes of three or more levels, includes: a semiconductor substrate; an epitaxial layer formed on the semiconductor substrate; a transistor formed on the epitaxial layer; a source electrode formed on the epitaxial layer and electrically connected to a source of the transistor; and a gate drawing electrode formed on the epitaxial layer and electrically connected to a gate of the transistor, wherein the source electrode includes a first source electrode, a second source electrode which is an electrode at a second or higher level on the first source electrode, and a third source electrode which is an electrode at a third or higher level on the second source electrode and above the gate drawing electrode, and the gate drawing electrode is an electrode at a second or higher level on the first source electrode and surrounded with the first, second, and third source electrodes.
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