FinFET with an asymmetric source/drain structure and method of making same

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United States of America Patent

PATENT NO 9882002
SERIAL NO

14987351

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Abstract

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Embodiments of the present disclosure are a semiconductor device, a FinFET device, and a method of forming a FinFET device. An embodiment is a semiconductor device comprising a first semiconductor fin extending above a substrate, a first source region on the first semiconductor fin, and a first drain region on the first semiconductor fin. The first source region has a first width and the first drain region has a second width with the second width being different than the first width.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Wei-Yu Hsin-Chu, TW 709 6443
Chiang, Ting-Wei New Taipei, TW 181 905
Guo, Ta-Pen Taipei, TW 109 1603
Song, Ming-Hsiang Shin-Chu, TW 60 569
Tseng, Hsiang-Jen Hsin-Chu, TW 40 301
Yang, Kuo-Nan Hsin-Chu, TW 142 964

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