Reduced capacity carrier and method of use
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United States of America Patent
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Jan 30, 2018
Issued Date -
N/A
app pub date -
Nov 14, 2014
filing date -
Aug 19, 2004
priority date (Note) -
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Abstract
A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.
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