Differential imaging with pattern recognition for process automation of cross sectioning applications
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United States of America Patent
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Jan 30, 2018
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Mar 28, 2016
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Oct 29, 2013
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Abstract
A method for using differential imaging for applications involving TEM samples by allowing operators to take multiple images during a procedure involving a focused ion beam procedure and overlaying the multiple images to create a differential image that clearly shows the differences between milling steps. The methods also involve generating real-time images of the area being milled and using the overlays of the differential images to show small changes in each image, and thus highlight the ion beam milling location. The methods also involve automating the process of creating differential images and using them to automatically mill subsequent slices.
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