Heat-spreading blanking system for high throughput electron beam apparatus

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United States of America Patent

PATENT NO 9881764
SERIAL NO

15255314

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Abstract

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An electron beam apparatus addresses blanking issues resulting from sinking high-power heat onto an aperture diaphragm by evenly spreading heat on the aperture diaphragm. The apparatus can include an aperture diaphragm and a deflector that deflects the electron beam on the aperture diaphragm. The electron beam is directed at the aperture diaphragm in a pattern around the aperture. The pattern may be a circle, square, or polygon. The pattern also may include a variable locus relative to the aperture.

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Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jiang, Xinrong Palo Alto, US 39 426
Larson, Douglas Sunnyvale, US 7 89
Sears, Christopher San Jose, US 51 171

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