Semiconductor defect categorization device and program for semiconductor defect categorization device
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United States of America Patent
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Jan 30, 2018
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app pub date -
Apr 11, 2013
filing date -
Apr 23, 2012
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Abstract
The present invention provides semiconductor defect classification equipment for classifying a defect in a semiconductor wafer. The semiconductor defect classification equipment is provided with: a display unit; a storage unit that stores an inspection image including an inspection object portion on the semiconductor wafer and design data of the semiconductor wafer including a plurality of manufacturing steps; and an processing unit that displays the inspection image and the design data on the display unit. The processing unit acquires at least one first layout data and the inspection image from the storage unit, and displays the first layout data and the inspection image on the display unit in a superposed manner.
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