Updating of a recipe for evaluating a manufacturing stage of an electrical circuit

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United States of America Patent

PATENT NO 9880550
SERIAL NO

14667086

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Abstract

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A computerized system that may include a recipe module and a yield diagnostics module. The yield diagnostics module may be configured to generate evaluation results that are indicative of an outcome of an evaluation process of at least one manufacturing stage of at least one electrical circuit. The evaluation results differ from end of line (EOL) results. The recipe module may be configured to receive EOL results relating to the at least one electrical circuit, to receive the evaluation results relating to the at least one electrical circuit; to correlate the evaluation results and the EOL results to provide correlation results; and respond to the correlation results. The responding to the correlation results may include determining whether to alter a recipe in response to the correlation results and altering the recipe if it is determined to alter the recipe.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS ISRAEL LTD9 OPPENHEIMER STREET PARK RABIN REHOVOT 7670109

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wachs, Amir Caesarea, IL 10 104

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