Developing solution processing device and processing method

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United States of America Patent

PATENT NO 9880471
SERIAL NO

14412139

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Abstract

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The purpose of the present invention is to provide a developing solution processing device and processing method that solve problems that accompany the occurrence of scum, improve product defect rate, increase the utilization ratio of manufacturing devices, and contribute considerably to reduced manufacturing costs and other factors through highly efficient recovery of noble metals. The present invention provides a developing solution processing device provided with: a centrifuge for separating a clarified liquid and a residue by centrifugally separating out developing solution after development processing; and a defoaming device for defoaming and discharging the clarified liquid.

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Patent Owner(s)

Patent OwnerAddress
TORAY INDUSTRIES INCJAPAN'S TOKYO CENTRAL NIHONBASHI MUROMACHI 2 CHOME 1 NO 1 TOKYO TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horiuchi, Ken Otsu, JP 13 169
Kondo, Atsushi Otsu, JP 80 644

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