Resins for underlayers

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United States of America Patent

PATENT NO 9880469
SERIAL NO

14792968

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Abstract

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Polymeric reaction products of certain substituted tetraarylmethane monomers are useful as underlayers in semiconductor manufacturing processes.

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Patent Owner(s)

Patent OwnerAddress
DUPONT ELECTRONIC MATERIALS INTERNATIONAL LLC455 FOREST STREET MARLBOROUGH MA 01752

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aqad, Emad Northborough, US 70 229
Cho, Sung Wook Gyeonggi-do, KR 37 122
Li, Mingqi Shrewsbury, US 105 434
Yamada, Shintaro Shrewsbury, US 90 484

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