Salt, acid generator, resin, resist composition and method for producing resist pattern

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United States of America Patent

PATENT NO 9880466
SERIAL NO

15151618

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Abstract

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A salt represented by formula (I):

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Patent Owner(s)

Patent OwnerAddress
SUMITOMO CHEMICAL COMPANY LIMITED2-7-1 NIHONBASHI CHUO-KU TOKYO 103-6020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ichikawa, Koji Osaka, JP 316 1995
Nishimura, Takashi Osaka, JP 255 2605

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