Pattern forming method

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United States of America Patent

PATENT NO 9880464
SERIAL NO

15248350

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Abstract

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According to one embodiment, an imprint pattern forming method includes providing a substrate with a pattern formation region and a peripheral region, the peripheral region having a surface lower than a surface of the pattern formation region, located at a periphery of the pattern formation region. The method includes forming an auxiliary pattern with a predetermined height on at least a portion of the peripheral region, providing a resist layer on at least the pattern formation region, and imprinting the resist layer using a template by locating the template in a region which includes a portion of the pattern formation region and a portion of the peripheral region.

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Patent Owner(s)

Patent OwnerAddress
KIOXIA CORPORATION1-21 SHIBAURA 3-CHOME MINATO-KU TOKYO 108-0023

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baba, Masanobu Yokkaichi Mie, JP 16 161
Ishikura, Taishi Kuwana Mie, JP 11 31
Kawamura, Daisuke Kiyosu Aichi, JP 120 1147
Matsuo, Koji Ama Aichi, JP 48 384
Shinozaki, Tatsuro Yokkaichi Mie, JP 3 17

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