Imprint method, imprint apparatus, and article manufacturing method
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United States of America Patent
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Jan 30, 2018
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N/A
app pub date -
Jun 7, 2012
filing date -
Jun 10, 2011
priority date (Note) -
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Abstract
A method of performing an imprint process on each of a plurality of shot regions of a substrate, wherein each shot region includes at least one of at least one valid chip area and at least one invalid chip area, the invalid chip area including an inhibited area in which resin coating is inhibited, the imprint process for a shot region including both the invalid chip area and the valid chip area includes coating the valid chip area of the shot region with the resin, bringing a pattern surface of a mold into contact with the resin, and curing the resin, and in the step of coating, at least the inhibited area of the invalid chip area is not coated with the resin.
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