Magnetic sensor manufacturing
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United States of America Patent
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Jan 30, 2018
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app pub date -
Mar 14, 2012
filing date -
Mar 14, 2012
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Abstract
A magnetic sensor comprising a first shield and a second shield and a sensor stack between the first and the second shield, the sensor stack having a plurality of layers wherein at least one layer is annealed using in-situ rapid thermal annealing. In one implementation of the magnetic sensor a seed layer is annealed using in-situ rapid thermal annealing. Alternatively, one of a barrier layer, an antiferromagnetic (AFM) layer, and a cap layer is annealed using in-situ rapid thermal annealing.
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