Edge crack detection system

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United States of America Patent

PATENT NO 9880220
SERIAL NO

15244142

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Abstract

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According to an exemplary embodiment, a method of detecting edge cracks in a die under test is provided. The method includes the following operations: receiving a command signal; providing power from the command signal; providing a response signal based on the command signal; and self-destructing based on the command signal.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Tsui-Mei Hsinchu, TW 11 18
Hsiao, Huang-Ting Taoyuan County, TW 6 24
Lu, Nai-Cheng Hsinchu County, TW 8 79
Tsai, Cheng-Hung Tainan, TW 58 857
Tsao, Pei-Haw Tai-chung, TW 119 1288
Xu, An-Tai Cupertino, US 5 20

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