Method of manufacturing a motion sensor device
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United States of America Patent
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Jan 30, 2018
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N/A
app pub date -
Jan 29, 2015
filing date -
Sep 16, 2011
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Abstract
A Micro-Electro-Mechanical System (MEMS) device includes a sensing element, and a proof mass over and overlapping at least a portion of the sensing element. The proof mass is configured to be movable toward the sensing element. A protection region is formed between the sensing element and the proof mass. The protection region overlaps a first portion of the sensing element, and does not overlap a second portion of the sensing element, wherein the first and the second portions overlap the proof mass.
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