Particulate matter detection apparatus
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United States of America Patent
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Jan 30, 2018
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app pub date -
Jun 29, 2013
filing date -
Apr 26, 2013
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Abstract
The present invention discloses a particulate matter detection apparatus, which comprises a gantry, a protect bar, a light emitter and a light receiver, there is a gap between the protect bar and the glass substrate to be detected, the gap has a predetermined height, the light emitter and the light receiver are located at the opposite sides of the glass substrate respectively. The particulate matter detection apparatus can detect particulate matter on the surface of glass substrates, such that the mask will not scraped and thus damaged by particulate matter.
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