Angular velocity sensor
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United States of America Patent
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Jan 30, 2018
Grant Date -
Aug 11, 2016
app pub date -
Jan 29, 2016
filing date -
Feb 5, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
An angular velocity sensor includes a mass body; a first frame provided outside of the mass body; a first flexible part connecting the mass body and the first frame to each other; a second flexible part connecting the mass body and the first frame to each other; a second frame provided outside of the first frame; a third flexible part connecting the first frame and the second frame to each other; and a fourth flexible part connecting the first frame and the second frame to each other, wherein the mass body is fixed to the first frame by the second flexible part so as to be rotation-displaceable and translation-displaceable, and the first frame is connected to the second frame by the fourth flexible part so as to be rotation-displaceable.
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