Heat shield ring for high growth rate EPI chamber

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United States of America Patent

PATENT NO 9879358
APP PUB NO 20160348275A1
SERIAL NO

15164610

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A heat shield assembly for an epitaxy chamber is described herein. The heat shield assembly has a heat shield member and a preheat member. The heat shield member is disposed on the preheat member. The heat shield member has a cutout portion that exposes a portion of the preheat member. The preheat member has a recessed portion to receive the heat shield member.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aoki, Yuji Yokohama, JP 140 1938
Mori, Yoshinobu Ohmura, JP 28 1395
Oki, Shinichi Chiba-Ken, JP 23 420

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