Detection system for detecting service life of baffle mechanism in a chamber for vacuum coating
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United States of America Patent
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Jan 30, 2018
Issued Date -
N/A
app pub date -
Sep 25, 2014
filing date -
May 6, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
A detection device includes a chamber for vacuum coating, a capacitance measurement device and a baffle mechanism located in the chamber. The baffle mechanism is a closed structure encompassed by a number of baffle walls, wherein at least one baffle wall includes a fixed baffle plate and a moveable baffle plate. The moveable baffle plate is pivotable about the fixed baffle plate. The moveable baffle plate, after pivoting, may get parallel with an adjacent baffle wall. The adjacent baffle wall and the moveable baffle plate are respectively connected to the capacitance measurement device, and the capacitance measurement device is used to measure the capacitance between the adjacent baffle wall and the moveable baffle plate. The detection device may accurately detect the service life of the baffle mechanism and achieve precise management of the apparatus.
First Claim
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International Classification(s)
- C23C:COATING METALLIC MATERIAL; COATING MATERIAL WITH M....
- H01J:ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- G01N:INVESTIGATING OR ANALYSING MATERIALS BY DETERMININ....
- G01R:MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC V....
- G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....
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