Stocker provided with purging functionality, stocker unit, and method for supplying cleaning gas
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 30, 2018
Issued Date -
N/A
app pub date -
Jun 21, 2013
filing date -
Aug 21, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A stocker includes cells including a purge function and cells not including the purge function. A cell not including the purge function is easily changed to a cell that includes the purge function. The stocker includes a frame to which multiple cell supports not including a cleaning gas supplying nozzle are configured to be attached along the vertical direction or the horizontal direction, and the base of a stocker unit is attached to the frame. The stocker unit includes a pipe configured to supply cleaning gas that is provided along the base, and multiple cell supports including the purge function that are attached to the base and are aligned along the vertical direction or the horizontal direction. Each cell support preferably is configured to support a container and includes a nozzle configured to supply cleaning gas from the pipe to the container.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2013 Application Filing Year
- H01L Class
- 22267 Applications Filed
- 20713 Patents Issued To-Date
- 93.03 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 2 Citation Count
- H01L Class
- 23.71 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 30, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 30, 2029 |
