Supervisory control of radio frequency (RF) impedance tuning operation
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United States of America Patent
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Jan 23, 2018
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app pub date -
Aug 18, 2015
filing date -
Aug 18, 2015
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Abstract
A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.
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