Component comprising stacked functional structures and method for producing same

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United States of America Patent

PATENT NO 9876158
SERIAL NO

14766674

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Abstract

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A component suitable for miniaturization and comprising acoustically decoupled functional structures is specified. The component comprises a first functional structure, a first thin-film cover, which covers the first functional structure, and a second functional structure above the thin-film cover. The thin-film cover does not touch the first functional structure.

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Patent Owner(s)

Patent OwnerAddress
SNAPTRACK INC5775 MOREHOUSE DRIVE SAN DIEGO CA 92121

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Henn, Gudrun Ebenhausen, DE 14 63
Metzger, Thomas München, DE 32 459

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